Theses most similar to Chip-scale modeling of pattern dependencies in copper chemical mechanical polishing processes (Gbondo-Tugbawa, Tamba Edward; 2002) read it
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Modeling of chemical mechanical polishing using fixed abrasive technology
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- Department of Electrical Engineering and Computer Science
- Advisor: Donald S. Boning Duane S. Boning
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Physical understanding and modeling of chemical mechanical planarization in dielectric materials
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- Advisor: Donald S. Boning Duane S. Boning
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- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
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Modeling of chemical mechanical polishing for shallow trench isolation
Gan, Terence (Terence Chihkiong), 1975- (2000)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science