Theses most similar to those of author Lee, Brian, 1975-
Modeling of chemical mechanical polishing for shallow trench isolation (2002) read it
Characterization and modeling of polysilicon MEMS chemical-mechanical polishing
Tang, Brian D. (Brian David), 1980- (2004)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
Modeling of chemical mechanical polishing using fixed abrasive technology
Dutt, Radhika, 1978- (2000)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
Chip-scale modeling of pattern dependencies in copper chemical mechanical polishing processes
Gbondo-Tugbawa, Tamba Edward (2002)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
Modeling of dielectric erosion and copper dishing in copper chemical-mechanical polishing
Noh, Kyungyoon (2005)
- Advisors: Dr. Jung-Hoon Chun; Nannaji Saka
- Department of Mechanical Engineering
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
Using statistical metrology to understand pattern-dependent ILD thickness variation in oxide CMP processes
Divecha, Rajesh Ramji (1997)
- Advisor: Duane Boning
- Department of Electrical Engineering and Computer Science
Physical understanding and modeling of chemical mechanical planarization in dielectric materials
Xie, Xiaoli (2007)
- Advisors: David Litster; Duane Boning
- Department of Physics
Modeling of advanced integrated circuit planarization processes : electrochemical-mechanical planarization (eCMP), STI CMP using non-conventional slurries
Johnson, Joy Marie (2009)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
Modeling of chemical mechanical polishing for shallow trench isolation
Gan, Terence (Terence Chihkiong), 1975- (2000)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
Exploring semiconductor device parameter space using rapid analytical modeling (1998) read it
MIT Device Simulation WebLab : an online simulator for microelectronic devices
Solis, Adrian (Adrian Orbita) (2004)
- Advisor: Jesús A. del Alamo
- Department of Electrical Engineering and Computer Science