Theses most similar to Modeling of chemical mechanical polishing for shallow trench isolation (Lee, Brian, 1975-; 2002) read it
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Tang, Brian D. (Brian David), 1980- (2004)
- Advisor: Donald S. Boning Duane S. Boning
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Dutt, Radhika, 1978- (2000)
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- Department of Electrical Engineering and Computer Science
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- Department of Electrical Engineering and Computer Science
- Advisor: Donald S. Boning Duane S. Boning
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Modeling of chemical mechanical polishing for shallow trench isolation
Gan, Terence (Terence Chihkiong), 1975- (2000)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science