Theses most similar to Characterization and modeling of pattern dependencies in copper interconnects for integrated circuits (Park, Tae Hong, 1973-; 2002) read it

Characterization and modeling of polysilicon MEMS chemical-mechanical polishing

Tang, Brian D. (Brian David), 1980- (2004)

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  • Department of Electrical Engineering and Computer Science
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Chip-scale modeling of pattern dependencies in copper chemical mechanical polishing processes

Gbondo-Tugbawa, Tamba Edward (2002)

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  • Department of Electrical Engineering and Computer Science
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Modeling of chemical mechanical polishing for shallow trench isolation

Lee, Brian, 1975- (2002)

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  • Department of Electrical Engineering and Computer Science
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Characterization and modeling of plasma etch pattern dependencies in integrated circuits

Abrokwah, Kwaku O (2006)

  • Advisor: Donald S. Boning Duane S. Boning
  • Department of Electrical Engineering and Computer Science
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Modeling of planarization technologies

Truque, Daniel (2007)

  • Advisor: Donald S. Boning Duane S. Boning
  • Department of Electrical Engineering and Computer Science
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Framework for characterization of copper interconnect in damascene CMP processes

Park, Tae Hong, 1973- (1998)

  • Advisors: Duane Boning; James Chung
  • Department of Electrical Engineering and Computer Science
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Polycrystalline Si thin films and devices : I. Seed selection through ion channeling II. Thin-film transistors

Kung, Kenneth Ting-Yuan (1988)

  • Advisor: L. Rafael Reif
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Characterization and modeling of uniformity in chemical mechanical polishing

Oji, Charles (Charles Ojih), 1974- (1999)

  • Advisors: Duane Boning; James Chung
  • Department of Electrical Engineering and Computer Science
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Liquid embossing : a technique for fabricating sub-micron electrical, mechanical and biological structures

Bulthaup, Colin A. (Colin Aaron), 1976- (2001)

  • Advisor: Joseph M. Jacobson
  • Department of Electrical Engineering and Computer Science
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Modeling of chemical mechanical polishing for shallow trench isolation

Gan, Terence (Terence Chihkiong), 1975- (2000)

  • Advisor: Donald S. Boning Duane S. Boning
  • Department of Electrical Engineering and Computer Science
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