Theses most similar to those of author Gould, Parker Andrew
Design, fabrication, and characterization of a compact deep reactive ion etching system for MEMS processing (2014) read it
Combustion systems for power-MEMS applications
Spadaccini, Christopher M. (Christopher Michael), 1974- (2004)
- Advisor: Ian A. Waitz
- Department of Aeronautics and Astronautics
- Advisor: S. Mark Spearing
- Department of Aeronautics and Astronautics
A high aspect-ratio silicon substrate-via technology and applications
Wu, Joyce H. (Joyce Hsia-Sing), 1974- (2000)
- Advisor: Jesús A. del Alamo
- Department of Electrical Engineering and Computer Science
Wafer surface cleaning for silicon homoepitaxy with and without ECR hydrogen plasma exposure
Kim, Hyoun-woo (1994)
- Advisor: L. Rafael Reif
- Department of Materials Science and Engineering
- Advisor: Sang-Gook Kim
- Department of Mechanical Engineering
- Advisor: Rajeev R. Ram
- Department of Electrical Engineering and Computer Science
Pulsed plasma enhanced chemical vapor deposition of fluorocarbon thin films for dielectric applications
Labelle, Catherine B., 1972- (1999)
- Advisor: Karen K. Gleason
- Department of Chemical Engineering
Evaluation of unsaturated fluorocarbons for dielectric Etch applications
Chatterjee, Ritwik, 1974- (2002)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
Design and manufacturing of an ion electrospray propulsion system package and passively-fed propellant supply
Perna, Louis Evan (2014)
- Advisor: Paulo C. Lozano
- Department of Aeronautics and Astronautics
Fabrication of a nanoporous membrane device for high heat flux evaporative cooling
Sircar, Jay D (2017)
- Advisor: Evelyn N. Wang
- Department of Mechanical Engineering