Theses most similar to those of author Guan, Don
Fabrication of stress controlled silicon oxide for free- standing MEMS Devices (2014) read it
A high aspect-ratio silicon substrate-via technology and applications
Wu, Joyce H. (Joyce Hsia-Sing), 1974- (2000)
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Integrated optical switching using titanium nitride micro electromechanical systems
Takahashi, Satosh (2006)
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Platform for monolithic integration of III-V devices with Si CMOS technology
Pacella, Nan Yang (2012)
- Advisor: Eugene A. Fitzgerald
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Fabrication technology for double-gate field effect transistors
Ritenour, Andrew P. (Andrew Paul), 1974- (1999)
- Advisor: Dimitri A. Antoniadis
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Optoelectonic integration using aligned metal-to-semiconductor bonding
Giziewicz, Wojciech Piotr, 1977- (2000)
- Advisor: Clifton G. Fonstad, Jr.
- Department of Electrical Engineering and Computer Science
- Advisor: Judy L. Hoyt
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