Theses most similar to those of author Labelle, Catherine B., 1972-
Pulsed plasma enhanced chemical vapor deposition of fluorocarbon thin films for dielectric applications (1999) read it
The synthesis and characterization of model interface couples for inorganic matrix composite applications
Chambers, Brent Victor (1994)
- Advisor: Ali S. Argon
- Department of Materials Science and Engineering
- Advisor: Leslie A. Kolodziejski
- Department of Electrical Engineering and Computer Science
An experimental study and modeling of Transformer-Coupled Toroidal Plasma processing of materials
Bai, Bo (2006)
- Advisor: Herbert H. Swain
- Department of Physics
Non-perfluorocompound chemistries for plasma etching of dielectrics
Tao, Benjamin A. (Benjamin Albert) (1996)
- Advisor: L. Rafael Reif
- Department of Materials Science and Engineering
Fabrication of optical-mode converters for efficient fiber-to-silicon-waveguide couplers
Barreto, Raúl E (2006)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Alternative chemistries for etching of silicon dioxide and silicon nitride
Karecki, Simon Martin (1996)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
- Advisor: Rajeev R. Ram
- Department of Electrical Engineering and Computer Science
Post oxide etching cleaning process using integrated ashing and HF vapor process
Kwon, Ohseung, 1969- (1999)
- Advisor: Herbert H. Swain
- Department of Materials Science and Engineering
Evaluation of unsaturated fluorocarbons for dielectric Etch applications
Chatterjee, Ritwik, 1974- (2002)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
Design, fabrication, and characterization of a compact deep reactive ion etching system for MEMS processing
Gould, Parker Andrew; Hsing, Mitchell David (2014)
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science