Theses most similar to those of author Levis, Kim-Marie, 1976-
Screening experiment for a polysilicon gate etch chamber (1999) read it
Analysis of DRIE uniformity for microelectromechanical systems
Hill, Tyrone F. (Tyrone Frank), 1980- (2004)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
Applying run-by-run process control to chemical-mechanical planarization and assessing insertion costs versus benefits of CMP
Altman, Arthur H (1995)
- Advisor: Duane Boning
- Department of Electrical Engineering and Computer Science
Assessment of an infrared camera for use as a control sensor for the chemical mechanical planarization process
Nishimoto, Angie Shizue, 1977- (1999)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
Characterization and modeling of uniformity in chemical mechanical polishing
Oji, Charles (Charles Ojih), 1974- (1999)
- Advisors: Duane Boning; James Chung
- Department of Electrical Engineering and Computer Science
Chamber matching in semiconductor manufacturing using statistical analysis and run-to-run control
Haskaraman, Feyza (2016)
- Advisor: Duane Boning
- Department of Mechanical Engineering