Theses most similar to those of author Lane, Jennifer M. (Jennifer Marie), 1977-
A fundamental study of feature evolution during high density plasma etching (1999) read it
Characterization and modeling of plasma etch pattern dependencies in integrated circuits
Abrokwah, Kwaku O (2006)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
- Advisor: Maria Flytzani-Stephanopoulos
- Department of Chemical Engineering
Growth and optical monitoring of organometallic vapor phase epitaxy
Foley, Lawrence J. (Lawrence Joseph) (1996)
- Advisor: Klavs F. Jensen
- Department of Materials Science and Engineering
- Advisor: Leslie A. Kolodziejski
- Department of Electrical Engineering and Computer Science
Characterization of low k CVD deposited interlayer dielectrics for integrated circuits
Harker, Marnie L. (Marnie Lynn), 1974- (1997)
- Advisor: Karen K. Gleason
- Department of Materials Science and Engineering
Feature profile evolution during the high density plasma etching of polysilicon
Mahorowala, Arpan P. (Arpan Pravin), 1970- (1998)
- Advisor: Herbert H. Swain
- Department of Chemical Engineering
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
Evaluation of unsaturated fluorocarbons for dielectric Etch applications
Chatterjee, Ritwik, 1974- (2002)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
- Advisor: Judy L. Hoyt
- Department of Electrical Engineering and Computer Science
Origin, evolution, and control of sidewall line edge roughness transfer during plasma etching
Rasgon, Stacy A., 1974- (2005)
- Advisor: Herbert H. Swain
- Department of Chemical Engineering