Theses most similar to those of author Yung, Chi-Fan, 1973-
A process technology for realizing integrated inertial sensors using deep reactive ion etching (DRIE) and aligned wafer bonding (1999) read it
Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)
Deutsch, Erik R. (Erik Robertson), 1974- (2002)
- Advisors: Rohatgi, Rajeev Rajan; Stephen D. Senturia
- Department of Electrical Engineering and Computer Science
- Advisors: Alexander H. Slocum; Jeffrey H. Lang
- Department of Mechanical Engineering
- Advisor: Sang-Gook Kim
- Department of Mechanical Engineering
- Advisor: Scott R. Manalis
- Department of Electrical Engineering and Computer Science
Scanning probe microscopy with inherent disturbance suppression using micromechanical systems
Sparks, Andrew William, 1977- (2005)
- Advisors: Anne M. Mayes; Scott R. Manalis
- Department of Materials Science and Engineering
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
- Advisor: George Barbastathis
- Department of Mechanical Engineering
Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing
Newton, Eric B (2012)
- Advisor: Carol Livermore
- Department of Mechanical Engineering
- Advisors: Jeffrey H. Lang; Martin A. Schmidt
- Department of Mechanical Engineering
- Advisor: Dr. Kamal Youcef-Toumi
- Department of Mechanical Engineering