Theses most similar to those of author Nishimoto, Angie Shizue, 1977-

Assessment of an infrared camera for use as a control sensor for the chemical mechanical planarization process (1999) read it

Characterization and modeling of polysilicon MEMS chemical-mechanical polishing

Tang, Brian D. (Brian David), 1980- (2004)

  • Advisor: Donald S. Boning Duane S. Boning
  • Department of Electrical Engineering and Computer Science
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Chip-scale modeling of pattern dependencies in copper chemical mechanical polishing processes

Gbondo-Tugbawa, Tamba Edward (2002)

  • Advisor: Donald S. Boning Duane S. Boning
  • Department of Electrical Engineering and Computer Science
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Applying run-by-run process control to chemical-mechanical planarization and assessing insertion costs versus benefits of CMP

Altman, Arthur H (1995)

  • Advisor: Duane Boning
  • Department of Electrical Engineering and Computer Science
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Modeling of planarization technologies

Truque, Daniel (2007)

  • Advisor: Donald S. Boning Duane S. Boning
  • Department of Electrical Engineering and Computer Science
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Physical understanding and modeling of chemical mechanical planarization in dielectric materials

Xie, Xiaoli (2007)

  • Advisors: David Litster; Duane Boning
  • Department of Physics
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Correlation of silicon microroughness with electrical parameters of SOI-AS (silicon-on-insulator with active substrate)

Nayfeh, Hasan M. (Hasan Munir), 1974- (1998)

  • Advisor: Dimitri A. Antoniadis
  • Department of Electrical Engineering and Computer Science
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Characterization and modeling of uniformity in chemical mechanical polishing

Oji, Charles (Charles Ojih), 1974- (1999)

  • Advisors: Duane Boning; James Chung
  • Department of Electrical Engineering and Computer Science
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Screening experiment for a polysilicon gate etch chamber

Levis, Kim-Marie, 1976- (1999)

  • Advisors: Gerald Benar; Klavs F. Jensen
  • Department of Materials Science and Engineering
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Device independent process control of dielectric chemical mechanical polishing

Smith, Taber H. (Taber Hardesty) (1999)

  • Advisor: Donald S. Boning Duane S. Boning
  • Department of Electrical Engineering and Computer Science
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Scratching by pad asperities in chemical mechanical polishing

Roberts, Michael P. (Michael Philip) (2011)

  • Advisor: Dr. Jung-Hoon Chun
  • Department of Mechanical Engineering
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