Theses most similar to those of author Farahanchi, Ali
Characterization and modeling of pattern dependencies and time evolution in plasma etching (2008) read it
Analysis of DRIE uniformity for microelectromechanical systems
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Feature profile evolution during the high density plasma etching of polysilicon
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Origin, evolution, and control of sidewall line edge roughness transfer during plasma etching
Rasgon, Stacy A., 1974- (2005)
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