Theses most similar to those of author Pruette, Laura C. (Laura Catherine), 1974-

Non-perfluorocompound chemistries for dielectric etching applications (1998) read it

Development of novel alternative chemistry processes for dielectric etch applications

Karecki, Simon Martin (2000)

  • Advisor: L. Rafael Reif
  • Department of Electrical Engineering and Computer Science
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Sputtered silicon oxynitride for microphotonics : a materials study

Sandland, Jessica Gene, 1977- (2004)

  • Advisor: Lionel C. Kimerling
  • Department of Materials Science and Engineering
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Growth and characterization of ZnSe by metalorganic and gas source molecular beam epitaxy

Coronado, Christopher Alan (1994)

  • Advisor: Leslie A. Kolodziejski
  • Department of Materials Science and Engineering
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Gas-phase cleaning of silicon wafer surfaces

Crane, Andrew S. (Andrew Scott), 1980- (1997)

  • Advisor: Herbert H. Sawin
  • Department of Chemical Engineering
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Growth and doping of zinc selenide using alternative gaseous source epitaxial techniques

Ho, Easen (1996)

  • Advisor: Leslie A. Kolodziejski
  • Department of Electrical Engineering and Computer Science
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Non-perfluorocompound chemistries for plasma etching of dielectrics

Tao, Benjamin A. (Benjamin Albert) (1996)

  • Advisor: L. Rafael Reif
  • Department of Materials Science and Engineering
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Growth and optical monitoring of organometallic vapor phase epitaxy

Foley, Lawrence J. (Lawrence Joseph) (1996)

  • Advisor: Klavs F. Jensen
  • Department of Materials Science and Engineering
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Alternative chemistries for etching of silicon dioxide and silicon nitride

Karecki, Simon Martin (1996)

  • Advisor: L. Rafael Reif
  • Department of Electrical Engineering and Computer Science
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Characterization of low k CVD deposited interlayer dielectrics for integrated circuits

Harker, Marnie L. (Marnie Lynn), 1974- (1997)

  • Advisor: Karen K. Gleason
  • Department of Materials Science and Engineering
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Evaluation of unsaturated fluorocarbons for dielectric Etch applications

Chatterjee, Ritwik, 1974- (2002)

  • Advisor: L. Rafael Reif
  • Department of Electrical Engineering and Computer Science
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Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction (2001) read it

Evaluation of unsaturated fluorocarbons for dielectric Etch applications

Chatterjee, Ritwik, 1974- (2002)

  • Advisor: L. Rafael Reif
  • Department of Electrical Engineering and Computer Science
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