Theses most similar to those of author Yin, Yunpen
Etching kinetics and surface roughening of polysilicon and dielectric materials in inductively coupled plasma beams (2007) read it
A study of plasma etching for use on active metals
Nishimoto, Keane T. (Keane Takeshi), 1981- (2005)
- Advisor: Dr. Jung-Hoon Chun
- Department of Mechanical Engineering
- Advisor: Herbert H. Sawin
- Department of Chemical Engineering
An experimental study and modeling of Transformer-Coupled Toroidal Plasma processing of materials
Bai, Bo (2006)
- Advisor: Herbert H. Swain
- Department of Physics
Chemical vapor deposition of organosilicon composite thin films for porous low-k dielectrics
Ross, April Denise, 1977- (2005)
- Advisor: Karen K. Gleason
- Department of Chemical Engineering
Feature profile evolution during the high density plasma etching of polysilicon
Mahorowala, Arpan P. (Arpan Pravin), 1970- (1998)
- Advisor: Herbert H. Swain
- Department of Chemical Engineering
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Fabrication of high-throughput critical-angle X-ray transmission gratings for wavelength-dispersive spectroscopy
Bruccoleri, Alexander Robert (2013)
- Advisor: Mark L. Schattenburg
- Department of Aeronautics and Astronautics
Post oxide etching cleaning process using integrated ashing and HF vapor process
Kwon, Ohseung, 1969- (1999)
- Advisor: Herbert H. Swain
- Department of Materials Science and Engineering
Origin, evolution, and control of sidewall line edge roughness transfer during plasma etching
Rasgon, Stacy A., 1974- (2005)
- Advisor: Herbert H. Swain
- Department of Chemical Engineering