Theses most similar to those of author Chang, Eric Choong-Yin
A statistical metrology framework for characterizing ILD thickness variation in CMP processes (1996) read it
- Advisor: Christopher J. Terman
- Department of Electrical Engineering and Computer Science
A digital technique for precise measurement of capacitor differences, with application to capacitive integrated sensors
Kung, Joseph T. (Joseph Tze-Shew) (1987)
- Advisors: Hae-Seung Lee; Roger T. Howe
- Department of Electrical Engineering and Computer Science
The effects of strain on carrier transport in thin and ultra-thin SOI MOSFETs
Lauer, Isaac, 1976- (2005)
- Advisor: Dimitri A. Antoniadis
- Department of Electrical Engineering and Computer Science
- Advisor: Duane Boning
- Department of Electrical Engineering and Computer Science
- Advisor: Jesus del Alamo
- Department of Electrical Engineering and Computer Science
Study of CMOS process variation by multiplexing analog characteristics
Gettings, Karen Mercedes González-Valentín (2007)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
- Advisor: Marc A. Kastner
- Department of Physics
Using statistical metrology to understand pattern-dependent ILD thickness variation in oxide CMP processes
Divecha, Rajesh Ramji (1997)
- Advisor: Duane Boning
- Department of Electrical Engineering and Computer Science
Framework for characterization of copper interconnect in damascene CMP processes
Park, Tae Hong, 1973- (1998)
- Advisors: Duane Boning; James Chung
- Department of Electrical Engineering and Computer Science
- Advisor: Jesús A. del Alamo
- Department of Electrical Engineering and Computer Science