Theses most similar to those of author Scheidl, Martin
The design and fabrication of movable micromachined mirrors (1988) read it
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
MEMS structures for stress measurements for thin films deposited using CVD
Lau, Yu-Hin F. (Yu-Hin Felix) (2001)
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
Nanostructured Origami (TM) : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges
Arora, William Jay (2005)
- Advisors: George Barbastathis; Henry I. Smith
- Department of Electrical Engineering and Computer Science
Integrated optical switching using titanium nitride micro electromechanical systems
Takahashi, Satosh (2006)
- Advisor: George Barbastathis
- Department of Mechanical Engineering
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
Packaging and interconnection of a black-lit CCD sensor device
Bennett, Joshua V. (Joshua Victor) (1997)
- Advisors: Chiang, Yet-ming; William Robbin
- Department of Materials Science and Engineering
A model of a fundamental-mode Lorentz force actuated flexural plate wave resonator
Hill, Misha K. (Misha Kim), 1975- (1999)
- Advisor: Stephen D. Senturia
- Department of Electrical Engineering and Computer Science
MEMS amplification of piezoelectric strain for in-plane actuation
Conway, Nicholas J. (Nicholas James), 1979- (2003)
- Advisor: Sang-Gook Kim
- Department of Mechanical Engineering
Design of curved electrodes to enable large stroke -- low voltage micro actuators
Newton, Eric B (2016)
- Advisor: Martin A. Schmidt
- Department of Mechanical Engineering