Theses most similar to those of author Kopanski, Krzysztof D
Analysis of slurry flow in chemical-mechanical polishing (2005) read it
Mechanics, mechanisms, and modeling of the chemical mechanical polishing process
Lai, Jiun-Yu (2001)
- Advisors: Dr. Jung-Hoon Chun; Nannaji Saka
- Department of Mechanical Engineering
Design, fabrication, experimentation and analysis of high-speed microscale gas bearings
Wong, Chee Wei, 1975- (2001)
- Advisors: Alan H. Epstein; Stuart A. Jacobso
- Department of Mechanical Engineering
- Advisor: Alan H. Epstein
- Department of Aeronautics and Astronautics
Numerical models for scoring failures of flexible metal to metal face seals
Hong, Jinchul, 1977- (2005)
- Advisors: Douglas P. Hart, Victor Wong; Tian Tian
- Department of Mechanical Engineering
- Advisor: Alan H. Epstein
- Department of Aeronautics and Astronautics
Face-up chemical mechanical polishing : kinematics and material removal rate
Jammalamadaka, Arvind K. (Arvind Kumar), 1981- (2006)
- Advisors: Dr. Jung-Hoon Chun; Nannaji Saka
- Department of Mechanical Engineering
A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating
Derksen, James Stephen (1997)
- Advisor: Dr. Jung-Hoon Chun
- Department of Mechanical Engineering
- Advisor: Dr. Jung-Hoon Chun
- Department of Mechanical Engineering
Exploring the mechanisms critical to the operation of metal face seals through modeling and experiments
Wang, Yong, Dept. of Aeronautic (2008)
- Advisor: Tian Tian
- Department of Aeronautics and Astronautics
Design of curved electrodes to enable large stroke -- low voltage micro actuators
Newton, Eric B (2016)
- Advisor: Martin A. Schmidt
- Department of Mechanical Engineering