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Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas (1993) read it

  • Advisor: Ronald R. Parker
  • Department of Electrical Engineering and Computer Science
  • Advisor: Luis Fernando Velásquez-García
  • Department of Electrical Engineering and Computer Science
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  • Department of Electrical Engineering and Computer Science
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  • Department of Mechanical Engineering
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  • Department of Aeronautics and Astronautics
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