Theses most similar to those of author Lau, Yu-Hin F. (Yu-Hin Felix)
MEMS structures for stress measurements for thin films deposited using CVD (2001) read it
Development of X-ray lithography and nanofabrication techniques for III-V optical devices
Lim, Michael H. (Michael Hong) (2002)
- Advisor: Hemry I. Smith
- Department of Electrical Engineering and Computer Science
Modeling and fabrication of self-assembling micron-scale rollup structures
Cybulski, James Stanley, 1979- (2004)
- Advisor: Gang Chen
- Department of Mechanical Engineering
Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)
Deutsch, Erik R. (Erik Robertson), 1974- (2002)
- Advisors: Rohatgi, Rajeev Rajan; Stephen D. Senturia
- Department of Electrical Engineering and Computer Science
A piezo-tunable gigahertz cavity microelectromechanical resonator
Hou, Stephen Ming-Chang, 1981- (2004)
- Advisor: Jeffrey H. Lang
- Department of Electrical Engineering and Computer Science
- Advisor: Alexander H. Slocum
- Department of Mechanical Engineering
Nanostructured Origami (TM) : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges
Arora, William Jay (2005)
- Advisors: George Barbastathis; Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
- Advisor: Rosemary L. Smith
- Department of Mechanical Engineering
Elimination of PZT thin film breakage caused by electric current arcing and intrinsic differential strains during poling
AlSaeed, Abdulelah (Abdulelah Ibrahim) (2012)
- Advisor: Dr. Jung-Hoon Chun
- Department of Mechanical Engineering
Design of curved electrodes to enable large stroke -- low voltage micro actuators
Newton, Eric B (2016)
- Advisor: Martin A. Schmidt
- Department of Mechanical Engineering