Theses most similar to those of author Rasgon, Stacy A., 1974-
Origin, evolution, and control of sidewall line edge roughness transfer during plasma etching (2005) read it
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
Characterization and modeling of plasma etch pattern dependencies in integrated circuits
Abrokwah, Kwaku O (2006)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
3-dimensional modeling and simulation of surface and sidewall roughening during plasma etching
Kawai, Hiroyo (2008)
- Advisor: Herbert H. Sawin
- Department of Chemical Engineering
- Advisor: Leslie A. Kolodziejski
- Department of Electrical Engineering and Computer Science
Etching kinetics and surface roughening of polysilicon and dielectric materials in inductively coupled plasma beams
Yin, Yunpen (2007)
- Advisor: Herbert H. Swain
- Department of Chemical Engineering
- Advisor: Leslie A. Kolodziejski
- Department of Electrical Engineering and Computer Science
Feature profile evolution during the high density plasma etching of polysilicon
Mahorowala, Arpan P. (Arpan Pravin), 1970- (1998)
- Advisor: Herbert H. Swain
- Department of Chemical Engineering
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
A fundamental study of feature evolution during high density plasma etching
Lane, Jennifer M. (Jennifer Marie), 1977- (1999)
- Advisor: Herbert H. Swain
- Department of Electrical Engineering and Computer Science
Fabrication of capacitors based on silicon nanowire arrays generated by metal-assisted wet chemical etching
Zheng, We (2016)
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering