Theses most similar to those of author Kwon, Ohseung, 1969-

Surface kinetics modeling of silicon oxide etching in fluorocarbon plasmas (2004) read it

  • Advisor: Peter H. Stone
  • Department of Earth, Atmospheric, and Planetary Sciences
  • Advisors: David I. Pau; Samuel M. Allen
  • Department of Materials Science and Engineering
  • Advisor: William M. Deen
  • Department of Chemical Engineering
  • Advisor: Jackie Y. Ying
  • Department of Chemical Engineering
  • Advisor: Michael W. Golay William W. Hoga
  • Department of Nuclear Engineering
  • Advisors: Ballinger, Ronald George; Sidney Yip, Vasily V. Bulatov
  • Department of Nuclear Engineering

Post oxide etching cleaning process using integrated ashing and HF vapor process (1999) read it

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  • Department of Electrical Engineering and Computer Science
  • Advisor: Karl K. Berggren
  • Department of Electrical Engineering and Computer Science
  • Advisor: Herbert H. Sawin
  • Department of Chemical Engineering
  • Advisor: Tomás Palacios
  • Department of Electrical Engineering and Computer Science
  • Advisor: Dimitri A. Antoniadis
  • Department of Electrical Engineering and Computer Science
  • Advisor: Scott R. Manalis
  • Department of Electrical Engineering and Computer Science
  • Advisor: Clifton G. Fonstad, Jr.
  • Department of Electrical Engineering and Computer Science
  • Advisor: Tomás Palacios
  • Department of Electrical Engineering and Computer Science