Theses most similar to those of author Karecki, Simon Martin
Development of novel alternative chemistry processes for dielectric etch applications (2000) read it
Non-perfluorocompound chemistries for plasma etching of dielectrics
Tao, Benjamin A. (Benjamin Albert) (1996)
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Alternative chemistries for etching of silicon dioxide and silicon nitride
Karecki, Simon Martin (1996)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
Non-perfluorocompound chemistries for dielectric etching applications
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- Advisor: L. Rafael Reif
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Pulsed plasma enhanced chemical vapor deposition of fluorocarbon thin films for dielectric applications
Labelle, Catherine B., 1972- (1999)
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Chatterjee, Ritwik, 1974- (2002)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
Alternative chemistries for etching of silicon dioxide and silicon nitride (1996) read it
Development of novel alternative chemistry processes for dielectric etch applications
Karecki, Simon Martin (2000)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
An experimental study and modeling of Transformer-Coupled Toroidal Plasma processing of materials
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Growth and doping of zinc selenide using alternative gaseous source epitaxial techniques
Ho, Easen (1996)
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Non-perfluorocompound chemistries for plasma etching of dielectrics
Tao, Benjamin A. (Benjamin Albert) (1996)
- Advisor: L. Rafael Reif
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Growth and optical monitoring of organometallic vapor phase epitaxy
Foley, Lawrence J. (Lawrence Joseph) (1996)
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Non-perfluorocompound chemistries for dielectric etching applications
Pruette, Laura C. (Laura Catherine), 1974- (1998)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
Pulsed plasma enhanced chemical vapor deposition of fluorocarbon thin films for dielectric applications
Labelle, Catherine B., 1972- (1999)
- Advisor: Karen K. Gleason
- Department of Chemical Engineering
Evaluation of unsaturated fluorocarbons for dielectric Etch applications
Chatterjee, Ritwik, 1974- (2002)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science