Theses most similar to those of author Sihler, Joachim, 1971-
A low-leakage 3-way silicon microvalve (2004) read it
Hydraulic amplification for actuation in microelectromechanical systems
Steyn, J. Lodewyk (Jasper Lodewyk), 1976- (2002)
- Advisor: Nesbitt W. Hagood, IV
- Department of Aeronautics and Astronautics
Design, fabrication, experimentation and analysis of high-speed microscale gas bearings
Wong, Chee Wei, 1975- (2001)
- Advisors: Alan H. Epstein; Stuart A. Jacobso
- Department of Mechanical Engineering
Design, modeling, fabrication and testing of a piezoelectric microvalve for high pressure, high frequency hydraulic applications
Roberts, David C. (David Christopher) (2002)
- Advisor: David L. Trumper
- Department of Mechanical Engineering
- Advisor: John G. Brisson
- Department of Mechanical Engineering
Elements for the design of precision machine tools and their application to a prototype 450mm Si-wafer grinder
Rothenhöfer, Gerald S. (Gerald Sven) (2010)
- Advisor: Alexander H. Slocum
- Department of Mechanical Engineering
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
- Advisor: Carol Livermore
- Department of Mechanical Engineering
The modeling and characterization of a Lorentz-force actuator for needle-free injection
Mendoza, Jonathan Michael (2011)
- Advisor: Ian Hunter
- Department of Mechanical Engineering
Measurement and modeling of the flow characteristics of micro disc valves
Carretero Benignos, Jorge Alejandro, 1972- (2001)
- Advisor: Kenneth S. Breuer
- Department of Aeronautics and Astronautics
- Advisor: Sang-Gook Kim
- Department of Mechanical Engineering