Theses most similar to Packaging of the MIT Microengine (Harrison, Todd S. (Todd Samuel), 1976-; 2000) read it
An evaluation of critical issues for microhydraulic transducers : silicon wafer bonding, strength of silicon on insulator membranes and gold-tin solder bonding
Turner, Kevin Thomas, 1977- (2001)
- Advisor: S. Mark Spearing
- Department of Mechanical Engineering
- Advisor: Igor Paul
- Department of Mechanical Engineering
Silicon carbide process development for microengine applications : residual stress control and microfabrication
Choi, Dongwon, 1973- (2004)
- Advisor: S. Mark Spearing
- Department of Materials Science and Engineering
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
Desktop systems for manufacturing carbon nanotube films by chemical vapor deposition
Kuhn, David S. (David Scott) (2007)
- Advisors: Alexander H. Slocum; David V. Burke, Jr.
- Department of Mechanical Engineering
An Exploration of the Effect of Temperature on Different Alloys in a Supercritical Carbon Dioxide Environment
Dunlevy, Michael William (2009)
- Advisor: Ballinger, Ronald George
- Department of Nuclear Science and Engineering
- Advisor: Donald R. SAdoway
- Department of Materials Science and Engineering
- Advisors: Thomas W. Eagar; Vien Nguyen
- Department of Mechanical Engineering
Design, fabrication, and characterization of a compact deep reactive ion etching system for MEMS processing
Gould, Parker Andrew; Hsing, Mitchell David (2014)
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
Interlaminar reinforcement of carbon fiber composites from unidirectional prepreg utilizing aligned carbon nanotubes
Lewis, Diana (Diana Jean) (2016)
- Advisor: Brian L. Wardle
- Department of Aeronautics and Astronautics