Theses most similar to Nanometer-scale placement in electron-beam lithography (Ferrera, Juan (Ferrera Uranga); 2000) read it
Beam alignment and image metrology for scanning beam interference lithography : fabricating gratings with nanometer phase accuracy
Chen, Carl Gang, 1972- (2003)
- Advisor: Mark L. Schattenburg
- Department of Electrical Engineering and Computer Science
Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortions
Konkola, Paul Thomas, 1973- (2003)
- Advisor: Mark L. Schattenburg
- Department of Mechanical Engineering
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
The development of a prototype Zone-Plate-Array Lithography (ZPAL) system
Patel, Amil Ashok, 1979- (2004)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
On the design of lithographic interferometers and their application
Walsh, Michael E. (Michael Edward), 1975- (2004)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning
Moon, Euclid E. (Euclid Eberle), 1965- (2004)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Mark Schattenburg
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Dynamic nanometer alignment for nanofabrication and metrology
Moon, Euclid E. (Euclid Eberle), 1965- (1998)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Three-dimensional nanostructures fabricated by stacking pre-patterned monocrystalline silicon nanomembranes
Fucetola, Corey Patrick (2013)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science