Theses most similar to Optical endpoint detection for the chemical mechanical polishing process (Nam, Jamie (Jamie Hyun), 1975-; 2000) read it
- Advisor: Alan H. Epstein
- Department of Mechanical Engineering
MEMS structures for stress measurements for thin films deposited using CVD
Lau, Yu-Hin F. (Yu-Hin Felix) (2001)
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
Development of a uniform-droplet spray apparatus for high melting temperature metals
Joumaa, Hady K (2005)
- Advisor: Dr. Jung-Hoon Chun
- Department of Mechanical Engineering
Fabrication process changes for performance improvement of an RF MEMS resonator : conformable contact lithography, Moiré alignment, and chlorine dry etching
Sakai, Mark (2005)
- Advisors: David L. Carte; Harry L. Tuller
- Department of Materials Science and Engineering
Dynamic nanometer alignment for nanofabrication and metrology
Moon, Euclid E. (Euclid Eberle), 1965- (1998)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Keith A. Nelson
- Department of Materials Science and Engineering
Elimination of PZT thin film breakage caused by electric current arcing and intrinsic differential strains during poling
AlSaeed, Abdulelah (Abdulelah Ibrahim) (2012)
- Advisor: Dr. Jung-Hoon Chun
- Department of Mechanical Engineering
Assessment of an infrared camera for use as a control sensor for the chemical mechanical planarization process
Nishimoto, Angie Shizue, 1977- (1999)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
- Advisors: Jeffrey H. Lang; Martin A. Schmidt
- Department of Mechanical Engineering
A study of the fabrication of thin lamination stator cores by the uniform droplet spray process
Lai, Jiun-Yu (1997)
- Advisor: Dr. Jung-Hoon Chun
- Department of Mechanical Engineering