Theses most similar to A six-degree-of-freedom compliant micro-manipulator for silicon optical bench (Chen, Shih-Chi, 1977-; 2003) read it
Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)
Deutsch, Erik R. (Erik Robertson), 1974- (2002)
- Advisors: Rohatgi, Rajeev Rajan; Stephen D. Senturia
- Department of Electrical Engineering and Computer Science
- Advisors: Alexander H. Slocum; Jeffrey H. Lang
- Department of Mechanical Engineering
Micro-opto-mechanical switching and tuning for integrated optical systems
Nielson, Gregory Nolan, 1974- (2004)
- Advisor: George Barbastathis
- Department of Mechanical Engineering
Nanostructured Origami (TM) : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges
Arora, William Jay (2005)
- Advisors: George Barbastathis; Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisors: Alexander H. Slocum; Jeffrey H. Lang
- Department of Mechanical Engineering
Integrated optical switching using titanium nitride micro electromechanical systems
Takahashi, Satosh (2006)
- Advisor: George Barbastathis
- Department of Mechanical Engineering
- Advisor: Carol Livermore
- Department of Mechanical Engineering
Design and development of an improved two-axis meso-scale electro-magnetic actuator for a flexure based nano-positioner
Nyovanie, Prosper M. (Prosper Munaishe) (2013)
- Advisor: Culpepper, Martin L. (Martin Luther)
- Department of Mechanical Engineering
3D micro and nanomanufacturing via folding of 2D membranes
Jurga, Stanley M. (Stanley Michael), 1978- (2003)
- Advisor: George Barbastathis
- Department of Mechanical Engineering
MEMS amplification of piezoelectric strain for in-plane actuation
Conway, Nicholas J. (Nicholas James), 1979- (2003)
- Advisor: Sang-Gook Kim
- Department of Mechanical Engineering