Theses most similar to Precision passive alignment of wafers (Weber, Alexis Christian, 1974-; 2002) read it
Modeling and fabrication of self-assembling micron-scale rollup structures
Cybulski, James Stanley, 1979- (2004)
- Advisor: Gang Chen
- Department of Mechanical Engineering
- Advisors: George Barbastathis; Mark L. Schattenburg
- Department of Mechanical Engineering
X-ray lithographic alignment and overlay applied to double-gate MOSFET fabrication
Meinhold, Mitchell W., 1972- (2003)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
MEMS structures for stress measurements for thin films deposited using CVD
Lau, Yu-Hin F. (Yu-Hin Felix) (2001)
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
Origami nanofabrication of three-dimensional electrochemical energy storage devices
In, Hyun Jin (2005)
- Advisor: George Barbastathis
- Department of Mechanical Engineering
Nanostructured Origami (TM) : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges
Arora, William Jay (2005)
- Advisors: George Barbastathis; Henry I. Smith
- Department of Electrical Engineering and Computer Science
Fabrication process changes for performance improvement of an RF MEMS resonator : conformable contact lithography, Moiré alignment, and chlorine dry etching
Sakai, Mark (2005)
- Advisors: David L. Carte; Harry L. Tuller
- Department of Materials Science and Engineering
A variable capacitor made from single crystal silicon fracture surface pairs
Sprunt, Alexander D. (Alexander Dalziel), 1977- (2005)
- Advisor: Alexander H. Slocum
- Department of Mechanical Engineering
A circular electrostatic zipping actuator for the application of a MEMS tunable capacitor
Yang, Xue'en, 1975- (2005)
- Advisor: Alexander H. Slocum
- Department of Mechanical Engineering
Low threshold vertical cavity surface emitting lasers integrated onto Si-CMOS ICs using novel hybrid assembly techniques
Perkins, James Michael, 1978- (2007)
- Advisor: Clifton G. Fonstad, Jr.
- Department of Electrical Engineering and Computer Science