Theses most similar to High-resolution micromachined interferometric accelerometer (Loh, Nin C. (Nin Chin), 1977-; 2001) read it
Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)
Deutsch, Erik R. (Erik Robertson), 1974- (2002)
- Advisors: Rohatgi, Rajeev Rajan; Stephen D. Senturia
- Department of Electrical Engineering and Computer Science
Design and characterization of acoustic pulse shape memory alloy actuators
Chambers, Joshua Michael (2005)
- Advisor: Steven R. Hall
- Department of Mechanical Engineering
Feedback loop design and experimental testing for integrated optics with micro-mechanical tuning
Waller, Laura A. (Laura Ann) (2005)
- Advisor: George Barbastathis
- Department of Electrical Engineering and Computer Science
Scanning probe microscopy with inherent disturbance suppression using micromechanical systems
Sparks, Andrew William, 1977- (2005)
- Advisors: Anne M. Mayes; Scott R. Manalis
- Department of Materials Science and Engineering
- Advisor: Qing Hu
- Department of Electrical Engineering and Computer Science
Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing
Newton, Eric B (2012)
- Advisor: Carol Livermore
- Department of Mechanical Engineering
Direct and quantitative broadband absorptance micro/nano spectroscopy using FTIR and bilayer cantilever probes
Hsu, Wei-Chun (2012)
- Advisor: Gang Chen
- Department of Mechanical Engineering
- Advisor: Dana Weinstein
- Department of Electrical Engineering and Computer Science
Piezoelectric micro-machined ultrasonic transducers for medical imaging
Smyth, Katherine Marie (2017)
- Advisors: Charles G. Sodini; Sang-Gook Kim
- Department of Mechanical Engineering
- Advisor: David L. Trumper
- Department of Mechanical Engineering