Theses most similar to Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction (Pruette, Laura C. (Laura Catherine), 1974-; 2001) read it
Evaluation of unsaturated fluorocarbons for dielectric Etch applications
Chatterjee, Ritwik, 1974- (2002)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science