Theses most similar to A MEMS valve for the MIT Microengine (Yang, Xue'en, 1975-; 2001) read it
Hydraulic amplification for actuation in microelectromechanical systems
Steyn, J. Lodewyk (Jasper Lodewyk), 1976- (2002)
- Advisor: Nesbitt W. Hagood, IV
- Department of Aeronautics and Astronautics
A high aspect-ratio silicon substrate-via technology and applications
Wu, Joyce H. (Joyce Hsia-Sing), 1974- (2000)
- Advisor: Jesús A. del Alamo
- Department of Electrical Engineering and Computer Science
- Advisor: Alan H. Epstein
- Department of Mechanical Engineering
- Advisor: Alexander H. Slocum
- Department of Mechanical Engineering
A circular electrostatic zipping actuator for the application of a MEMS tunable capacitor
Yang, Xue'en, 1975- (2005)
- Advisor: Alexander H. Slocum
- Department of Mechanical Engineering
Through-substrate interconnects for 3-D integration and RF systems
Wu, Joyce H. (Joyce Hsia-Sing), 1974- (2006)
- Advisor: Jesús A. del Alamo
- Department of Electrical Engineering and Computer Science
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
- Advisors: Akintunde Ibitayo (Tayo) Akinwande; Luis Fernando Velásquez-García
- Department of Electrical Engineering and Computer Science
Design and manufacturing of an ion electrospray propulsion system package and passively-fed propellant supply
Perna, Louis Evan (2014)
- Advisor: Paulo C. Lozano
- Department of Aeronautics and Astronautics
Evaporation from nanoporous membranes for high heat flux thermal management
Hanks, Daniel Frank (2016)
- Advisor: Evelyn N. Wang
- Department of Mechanical Engineering