Theses most similar to Three-dimensional nanostructures fabricated by stacking pre-patterned monocrystalline silicon nanomembranes (Fucetola, Corey Patrick; 2013) read it

Nanometer-scale placement in electron-beam lithography

Ferrera, Juan (Ferrera Uranga) (2000)

  • Advisor: Henry I. Smith
  • Department of Electrical Engineering and Computer Science
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Fabrication of extremely smooth blazed diffraction gratings

Chang, Chih-Hao, 1980- (2004)

  • Advisors: George Barbastathis; Mark L. Schattenburg
  • Department of Mechanical Engineering
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X-ray lithographic alignment and overlay applied to double-gate MOSFET fabrication

Meinhold, Mitchell W., 1972- (2003)

  • Advisor: Henry I. Smith
  • Department of Electrical Engineering and Computer Science
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Nanometer-precision electron-beam lithography with applications in integrated optics

Hastings, Jeffrey Todd, 1975- (2003)

  • Advisor: Henry I. Smith
  • Department of Electrical Engineering and Computer Science
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Fabrication of distributed feeback devices using X-ray lithography

Wong, Vincent V (1995)

  • Advisor: Henry I. Smith
  • Department of Electrical Engineering and Computer Science
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Real-time spatial-phase-locked electron-beam lithography

Zhang, Feng, 1973- (2005)

  • Advisor: Henry I. Smith
  • Department of Electrical Engineering and Computer Science
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Design and fabrication of efficient fiber to chip couplers

Araghchini, Mohammad (2008)

  • Advisor: Franz. X. Kaertner
  • Department of Electrical Engineering and Computer Science
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Membrane technology for the fabrication of three-dimensional photonic crystals

Patel, Amil Ashok, 1979- (2010)

  • Advisor: Henry I. Smith
  • Department of Electrical Engineering and Computer Science
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On the development of a low-cost lithographic interferometer

Korre, Hasan (2010)

  • Advisor: Karl K. Berggren
  • Department of Electrical Engineering and Computer Science
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Design and fabrication of a superprism using 2D photonic crystals

Tandon, Sheila (Sheila N.), 1978- (2002)

  • Advisor: Leslie A. Kolodziejski
  • Department of Electrical Engineering and Computer Science
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