Theses most similar to Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS) (Deutsch, Erik R. (Erik Robertson), 1974-; 2002) read it
Strain-tuning of periodic optical devices : tunable gratings and photonic crystals
Wong, Chee Wei, 1975- (2003)
- Advisors: Lionel C. Kimerling; Sang-Gook Kim
- Department of Mechanical Engineering
- Advisors: Alexander H. Slocum; Jeffrey H. Lang
- Department of Mechanical Engineering
MEMS structures for stress measurements for thin films deposited using CVD
Lau, Yu-Hin F. (Yu-Hin Felix) (2001)
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
- Advisors: Alexander H. Slocum; Jeffrey H. Lang
- Department of Mechanical Engineering
Acoustic assisted actuation of Ni-Mn-Ga ferromagnetic shape memory alloys
Peterson, Bradley William (2006)
- Advisor: Samuel M. Allen
- Department of Materials Science and Engineering
- Advisor: Gang Chen
- Department of Mechanical Engineering
- Advisor: Carol Livermore
- Department of Mechanical Engineering
Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing
Newton, Eric B (2012)
- Advisor: Carol Livermore
- Department of Mechanical Engineering
Design of curved electrodes to enable large stroke -- low voltage micro actuators
Newton, Eric B (2016)
- Advisor: Martin A. Schmidt
- Department of Mechanical Engineering
Piezoelectric micro-machined ultrasonic transducers for medical imaging
Smyth, Katherine Marie (2017)
- Advisors: Charles G. Sodini; Sang-Gook Kim
- Department of Mechanical Engineering