Theses most similar to An electrothermally-actuated bistable MEMS relay for power applications (Qiu, Jin, 1974-; 2003) read it
Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)
Deutsch, Erik R. (Erik Robertson), 1974- (2002)
- Advisors: Rohatgi, Rajeev Rajan; Stephen D. Senturia
- Department of Electrical Engineering and Computer Science
- Advisors: Alexander H. Slocum; Jeffrey H. Lang
- Department of Mechanical Engineering
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
- Advisor: Sang-Gook Kim
- Department of Aeronautics and Astronautics
Optimization of a micromechanical single element oscillator using nonlinear electrostatic cotnrol
Kossuth, Jonathan Andrew, 1970- (1998)
- Advisors: Deyst, John J. (John Jacob); Wallace E. VanderVelde
- Department of Aeronautics and Astronautics
- Advisor: Carol Livermore
- Department of Mechanical Engineering
Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing
Newton, Eric B (2012)
- Advisor: Carol Livermore
- Department of Mechanical Engineering
- Advisor: Sang-Gook Kim
- Department of Mechanical Engineering
A process technology for realizing integrated inertial sensors using deep reactive ion etching (DRIE) and aligned wafer bonding
Yung, Chi-Fan, 1973- (1999)
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
Design of curved electrodes to enable large stroke -- low voltage micro actuators
Newton, Eric B (2016)
- Advisor: Martin A. Schmidt
- Department of Mechanical Engineering