Theses most similar to Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing (Newton, Eric B; 2012) read it
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- Department of Aeronautics and Astronautics
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Marathe, Radhika (Radhika Atul) (2011)
- Advisor: Dana Weinstein
- Department of Electrical Engineering and Computer Science
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A process technology for realizing integrated inertial sensors using deep reactive ion etching (DRIE) and aligned wafer bonding
Yung, Chi-Fan, 1973- (1999)
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Smyth, Katherine Marie (2017)
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