Theses most similar to 3D assembly and actuation of nanopatterned membranes using nanomagnets (Nichol, Anthony John; 2011) read it
Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)
Deutsch, Erik R. (Erik Robertson), 1974- (2002)
- Advisors: Rohatgi, Rajeev Rajan; Stephen D. Senturia
- Department of Electrical Engineering and Computer Science
- Advisors: Alexander H. Slocum; Jeffrey H. Lang
- Department of Mechanical Engineering
Origami nanofabrication of three-dimensional electrochemical energy storage devices
In, Hyun Jin (2005)
- Advisor: George Barbastathis
- Department of Mechanical Engineering
Optoelectronic integration using the magnetically assisted statistical assembly technique : initial magnetic characterization and process development
Rumpler, Joseph John, 1976- (2002)
- Advisor: Clifton G. Fonstad, Jr.
- Department of Electrical Engineering and Computer Science
Nanostructured Origami (TM) : folding thin films out of the plane of a silicon wafer with highly stressed chromium hinges
Arora, William Jay (2005)
- Advisors: George Barbastathis; Henry I. Smith
- Department of Electrical Engineering and Computer Science
Low threshold vertical cavity surface emitting lasers integrated onto Si-CMOS ICs using novel hybrid assembly techniques
Perkins, James Michael, 1978- (2007)
- Advisor: Clifton G. Fonstad, Jr.
- Department of Electrical Engineering and Computer Science
Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing
Newton, Eric B (2012)
- Advisor: Carol Livermore
- Department of Mechanical Engineering
A process technology for realizing integrated inertial sensors using deep reactive ion etching (DRIE) and aligned wafer bonding
Yung, Chi-Fan, 1973- (1999)
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
Assembling 3D MEMS structures by folding, aligning and latching 2D patterned films
Shaar, Nader S. (Nader Salah) (2014)
- Advisors: Carol Livermore; George Barbastathis
- Department of Mechanical Engineering
Fabrication and characterization of nanostructured magnetic particles for applications in data storage
Farhoud, Maya S. (Maya Sami) (2001)
- Advisors: Caroline A. Ross; Henry I. Smith
- Department of Electrical Engineering and Computer Science