Theses most similar to Low-voltage spatial-phase-locked scanning-electron-beam lithography (Cheong, Lin Lee; 2010) read it
Fabrication and characterization of nanostructures from self-assembled block copolymers
Cheng, Joy, 1974- (2003)
- Advisor: Caroline A. Ross
- Department of Materials Science and Engineering
Chemical vapor deposition of conjugated polymeric thin films for photonic and electronic applications
Lock, John P (2005)
- Advisor: Karen K. Gleason
- Department of Chemical Engineering
Design and fabrication of an electrically-activated photonic crystal nanocavity laser
Mattson, Eric (Eric Michael) (2005)
- Advisor: Leslie A. Kolodziejski
- Department of Electrical Engineering and Computer Science
Fabrication of superconducting nanowire single proton detectors
Yang, Joel K. (Joel Kwang wei) (2005)
- Advisor: Karl K. Berggren
- Department of Electrical Engineering and Computer Science
Fabrication of optical-mode converters for efficient fiber-to-silicon-waveguide couplers
Barreto, Raúl E (2006)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Etching kinetics and surface roughening of polysilicon and dielectric materials in inductively coupled plasma beams
Yin, Yunpen (2007)
- Advisor: Herbert H. Swain
- Department of Chemical Engineering
- Advisor: Rajeev R. Ram
- Department of Electrical Engineering and Computer Science
- Advisor: Leslie Kolodziejski
- Department of Electrical Engineering and Computer Science
Sub-10-nm electron-beam lithography for templated placement of colloidal quantum dots
Manfrinato, Vitor Riseti (2011)
- Advisor: Karl K. Berggren
- Department of Electrical Engineering and Computer Science