Theses most similar to Framework for characterization of copper interconnect in damascene CMP processes (Park, Tae Hong, 1973-; 1998) read it
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Wu, Joyce H. (Joyce Hsia-Sing), 1974- (2006)
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Divecha, Rajesh Ramji (1997)
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Gan, Terence (Terence Chihkiong), 1975- (2000)
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