Theses most similar to Non-perfluorocompound chemistries for dielectric etching applications (Pruette, Laura C. (Laura Catherine), 1974-; 1998) read it
Development of novel alternative chemistry processes for dielectric etch applications
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- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
Sputtered silicon oxynitride for microphotonics : a materials study
Sandland, Jessica Gene, 1977- (2004)
- Advisor: Lionel C. Kimerling
- Department of Materials Science and Engineering
Growth and characterization of ZnSe by metalorganic and gas source molecular beam epitaxy
Coronado, Christopher Alan (1994)
- Advisor: Leslie A. Kolodziejski
- Department of Materials Science and Engineering
- Advisor: Herbert H. Sawin
- Department of Chemical Engineering
Growth and doping of zinc selenide using alternative gaseous source epitaxial techniques
Ho, Easen (1996)
- Advisor: Leslie A. Kolodziejski
- Department of Electrical Engineering and Computer Science
Non-perfluorocompound chemistries for plasma etching of dielectrics
Tao, Benjamin A. (Benjamin Albert) (1996)
- Advisor: L. Rafael Reif
- Department of Materials Science and Engineering
Growth and optical monitoring of organometallic vapor phase epitaxy
Foley, Lawrence J. (Lawrence Joseph) (1996)
- Advisor: Klavs F. Jensen
- Department of Materials Science and Engineering
Alternative chemistries for etching of silicon dioxide and silicon nitride
Karecki, Simon Martin (1996)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science
Characterization of low k CVD deposited interlayer dielectrics for integrated circuits
Harker, Marnie L. (Marnie Lynn), 1974- (1997)
- Advisor: Karen K. Gleason
- Department of Materials Science and Engineering
Evaluation of unsaturated fluorocarbons for dielectric Etch applications
Chatterjee, Ritwik, 1974- (2002)
- Advisor: L. Rafael Reif
- Department of Electrical Engineering and Computer Science