Theses most similar to Characterization of low k CVD deposited interlayer dielectrics for integrated circuits (Harker, Marnie L. (Marnie Lynn), 1974-; 1997) read it
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Barkley, Edward Robert, 1977- (2001)
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- Department of Electrical Engineering and Computer Science
Chemical vapor deposition of organosilicon and sacrificial polymer thin films
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- Advisor: Karen K. Gleason
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- Advisor: Klavs F. Jensen
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London, Joanna M., 1974- (1998)
- Advisor: Clifton G. Fonstad, Jr.
- Department of Electrical Engineering and Computer Science
- Advisors: Mildred S. Dresselhaus; Tomás Palacios
- Department of Electrical Engineering and Computer Science
A fundamental study of feature evolution during high density plasma etching
Lane, Jennifer M. (Jennifer Marie), 1977- (1999)
- Advisor: Herbert H. Swain
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- Advisor: Karen K. Gleason
- Department of Chemical Engineering
- Advisor: Judy L. Hoyt
- Department of Electrical Engineering and Computer Science