Theses most similar to Ultra-high precision scanning beam interference lithography and its application : spatial frequency multiplication (Zhao, Yong, 1980-; 2008) read it

Beam alignment and image metrology for scanning beam interference lithography : fabricating gratings with nanometer phase accuracy

Chen, Carl Gang, 1972- (2003)

  • Advisor: Mark L. Schattenburg
  • Department of Electrical Engineering and Computer Science
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Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortions

Konkola, Paul Thomas, 1973- (2003)

  • Advisor: Mark L. Schattenburg
  • Department of Mechanical Engineering
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Nanometer-scale placement in electron-beam lithography

Ferrera, Juan (Ferrera Uranga) (2000)

  • Advisor: Henry I. Smith
  • Department of Electrical Engineering and Computer Science
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Toward nano-accuracy in scanning beam interference lithography

Montoya, Juan, 1976- (2006)

  • Advisor: Mark Schattenburg
  • Department of Electrical Engineering and Computer Science
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Using computer microvision to characterize the motions of a microfabricated gyroscope

Johnson, Laura Karine (1997)

  • Advisor: Dennis M. Freeman
  • Department of Electrical Engineering and Computer Science
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Image grating metrology using a Fresnel zone plate

Joo, Chulmin, 1976- (2003)

  • Advisors: George Barbastathis; Mark L. Schattenburg
  • Department of Mechanical Engineering
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