Theses most similar to Silicon microaccelerometer fabrication technologies (Hsu, Charles Heng-Yuan, 1967-; 1997) read it
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- Department of Mechanical Engineering
Force multiplier in a microelectromechanical silicon oscillating accelerometer
St. Michel, Nathan A. (Nathan Alan), 1975- (2000)
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- Department of Mechanical Engineering
- Advisor: Charles G. Sodini
- Department of Electrical Engineering and Computer Science
Scanning probe microscopy with inherent disturbance suppression using micromechanical systems
Sparks, Andrew William, 1977- (2005)
- Advisors: Anne M. Mayes; Scott R. Manalis
- Department of Materials Science and Engineering
- Advisor: David L. Trumper
- Department of Mechanical Engineering
- Advisor: Carol Livermore
- Department of Mechanical Engineering
Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing
Newton, Eric B (2012)
- Advisor: Carol Livermore
- Department of Mechanical Engineering
A process technology for realizing integrated inertial sensors using deep reactive ion etching (DRIE) and aligned wafer bonding
Yung, Chi-Fan, 1973- (1999)
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
- Advisors: Jeffrey H. Lang; Martin A. Schmidt
- Department of Mechanical Engineering
- Advisor: Dr. Kamal Youcef-Toumi
- Department of Mechanical Engineering