Theses most similar to Dynamic nanometer alignment for nanofabrication and metrology (Moon, Euclid E. (Euclid Eberle), 1965-; 1998) read it
Beam alignment and image metrology for scanning beam interference lithography : fabricating gratings with nanometer phase accuracy
Chen, Carl Gang, 1972- (2003)
- Advisor: Mark L. Schattenburg
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Gang Chen
- Department of Mechanical Engineering
Fabrication process changes for performance improvement of an RF MEMS resonator : conformable contact lithography, Moiré alignment, and chlorine dry etching
Sakai, Mark (2005)
- Advisors: David L. Carte; Harry L. Tuller
- Department of Materials Science and Engineering
Design and fabrication of an electrically-activated photonic crystal nanocavity laser
Mattson, Eric (Eric Michael) (2005)
- Advisor: Leslie A. Kolodziejski
- Department of Electrical Engineering and Computer Science
Two-dimensional photonic crystals as selective emitters for thermophotovoltaic power conversion applications
Jovanovic, Natalija Zorana (2005)
- Advisor: John G. Kassakian
- Department of Electrical Engineering and Computer Science
- Advisor: Mark Schattenburg
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Design and fabrication of micro- and nano- dielectric structures for imaging and focusing at optical frequencies
Takahashi, Satosh (2011)
- Advisor: George Barbastathis
- Department of Mechanical Engineering
Three-dimensional nanostructures fabricated by stacking pre-patterned monocrystalline silicon nanomembranes
Fucetola, Corey Patrick (2013)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science