Theses most similar to Gas-phase cleaning of silicon wafer surfaces (Crane, Andrew S. (Andrew Scott), 1980-; 1997) read it
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Lazo, Nicole Danielle B. (Nicole Danielle Bautista) (1994)
- Advisor: Lionel C. Kimerling
- Department of Materials Science and Engineering
- Advisor:
- Department of Electrical Engineering and Computer Science
- Advisor: Lionel C. Kimerling
- Department of Materials Science and Engineering
Electrochemical and photoelectrochemical micromachining of silicon in HF electroytes
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Foley, Lawrence J. (Lawrence Joseph) (1996)
- Advisor: Klavs F. Jensen
- Department of Materials Science and Engineering
The ion-beam reactive sputtering process for deposition of niobium nitride thin films
Lichtenwalner, Daniel Jenner (1990)
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- Department of Materials Science and Engineering
- Advisor: Leslie A. Kolodziejski
- Department of Electrical Engineering and Computer Science
Non-perfluorocompound chemistries for dielectric etching applications
Pruette, Laura C. (Laura Catherine), 1974- (1998)
- Advisor: L. Rafael Reif
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Post oxide etching cleaning process using integrated ashing and HF vapor process
Kwon, Ohseung, 1969- (1999)
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- Advisor: Judy L. Hoyt
- Department of Electrical Engineering and Computer Science