Theses most similar to Design and implementation of a high precision profilometer (Kwok, Tarzen; 1995) read it
A six-degree of freedom flexural positioning stage
Anderson, Gordon A. B. (Gordon Alexander Brewster), 1977- (2003)
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Design and fabrication of a high precision wafer polishing machine
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Beal, David Nelson, 1973- (1997)
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Barrett, Lawrence D. (Lawrence David) (1997)
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Sensor system design to determine position and orientation of articulated structures
Slocum, Alexander H (1985)
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Hopkins, Jonathan B. (Jonathan Brigham) (2010)
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- Department of Mechanical Engineering