Theses most similar to Toward nano-accuracy in scanning beam interference lithography (Montoya, Juan, 1976-; 2006) read it
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Chen, Carl Gang, 1972- (2003)
- Advisor: Mark L. Schattenburg
- Department of Electrical Engineering and Computer Science
Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortions
Konkola, Paul Thomas, 1973- (2003)
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Patel, Amil Ashok, 1979- (2004)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
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- Department of Electrical Engineering and Computer Science
Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning
Moon, Euclid E. (Euclid Eberle), 1965- (2004)
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- Department of Electrical Engineering and Computer Science
Evaluation of spatial-spectral filtering in non-paraxial volume holographic imaging systems
Watson, Jonathan M (2008)
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- Department of Mechanical Engineering
Multilevel interference lithography--fabricating sub-wavelength periodic nanostructures
Chang, Chih-Hao, 1980- (2008)
- Advisor: Mark L. Schattenburg
- Department of Mechanical Engineering
- Advisor: Karl K. Berggren
- Department of Electrical Engineering and Computer Science
Design and implementation of a high-speed solid-state acousto-optic interference pattern projector for three-dimensional imaging
Feldkhun, Daniel L., 1976- (1999)
- Advisors: Dennis Freeman; Lyle G. Shirley
- Department of Electrical Engineering and Computer Science
- Advisors: George Barbastathis; Mark L. Schattenburg
- Department of Mechanical Engineering