Theses most similar to Applying run-by-run process control to chemical-mechanical planarization and assessing insertion costs versus benefits of CMP (Altman, Arthur H; 1995) read it
Process improvements in laser diode manufacturing : identifying variation and the economics of reducing it
Coggin, Mark Soterios (1995)
- Advisors: Thomas W. Eagar; Vien Nguyen
- Department of Materials Science and Engineering
Modeling of pattern dependencies in the fabrication of multilevel copper metallization
Cai, Hon (2007)
- Advisors: Carl V. Thompson, II; Donald S. Boning Duane S. Boning
- Department of Materials Science and Engineering
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
Physical understanding and modeling of chemical mechanical planarization in dielectric materials
Xie, Xiaoli (2007)
- Advisors: David Litster; Duane Boning
- Department of Physics
Framework for characterization of copper interconnect in damascene CMP processes
Park, Tae Hong, 1973- (1998)
- Advisors: Duane Boning; James Chung
- Department of Electrical Engineering and Computer Science
Assessment of an infrared camera for use as a control sensor for the chemical mechanical planarization process
Nishimoto, Angie Shizue, 1977- (1999)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
Characterization and modeling of uniformity in chemical mechanical polishing
Oji, Charles (Charles Ojih), 1974- (1999)
- Advisors: Duane Boning; James Chung
- Department of Electrical Engineering and Computer Science
- Advisors: Gerald Benar; Klavs F. Jensen
- Department of Materials Science and Engineering
Device independent process control of dielectric chemical mechanical polishing
Smith, Taber H. (Taber Hardesty) (1999)
- Advisor: Donald S. Boning Duane S. Boning
- Department of Electrical Engineering and Computer Science
Chamber matching in semiconductor manufacturing using statistical analysis and run-to-run control
Haskaraman, Feyza (2016)
- Advisor: Duane Boning
- Department of Mechanical Engineering