Theses most similar to A voltage-tunable microfabricated accelerometer (Lubratt, Mark Paul; 1991) read it
MEMS structures for stress measurements for thin films deposited using CVD
Lau, Yu-Hin F. (Yu-Hin Felix) (2001)
- Advisor: Carl V. Thompson, II
- Department of Materials Science and Engineering
- Advisor: Sang-Gook Kim
- Department of Mechanical Engineering
- Advisor: Scott R. Manalis
- Department of Electrical Engineering and Computer Science
A circular electrostatic zipping actuator for the application of a MEMS tunable capacitor
Yang, Xue'en, 1975- (2005)
- Advisor: Alexander H. Slocum
- Department of Mechanical Engineering
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
- Advisor: Vladimir BuloviÄ
- Department of Electrical Engineering and Computer Science
A model of a fundamental-mode Lorentz force actuated flexural plate wave resonator
Hill, Misha K. (Misha Kim), 1975- (1999)
- Advisor: Stephen D. Senturia
- Department of Electrical Engineering and Computer Science
A process technology for realizing integrated inertial sensors using deep reactive ion etching (DRIE) and aligned wafer bonding
Yung, Chi-Fan, 1973- (1999)
- Advisor: Martin A. Schmidt
- Department of Electrical Engineering and Computer Science
Design of curved electrodes to enable large stroke -- low voltage micro actuators
Newton, Eric B (2016)
- Advisor: Martin A. Schmidt
- Department of Mechanical Engineering