Theses most similar to Integrated analog focal plane processing for automatic alignment (Umminger, Christopher Bruce; 1995) read it
Beam alignment and image metrology for scanning beam interference lithography : fabricating gratings with nanometer phase accuracy
Chen, Carl Gang, 1972- (2003)
- Advisor: Mark L. Schattenburg
- Department of Electrical Engineering and Computer Science
Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortions
Konkola, Paul Thomas, 1973- (2003)
- Advisor: Mark L. Schattenburg
- Department of Mechanical Engineering
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor: Ichiro Masaki
- Department of Electrical Engineering and Computer Science
Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning
Moon, Euclid E. (Euclid Eberle), 1965- (2004)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
The sensor based manipulation of irregularly shaped objects with special application to the semiconductor industry
Sujan, Vivek Anand, 1972- (1998)
- Advisor: Steven Dubowsky
- Department of Mechanical Engineering
Multiplexed photography : single-exposure capture of multiple camera settings
Green, Paul Elijah (2009)
- Advisor: Frédo Durand
- Department of Electrical Engineering and Computer Science
- Advisor: Dennis M. Freeman
- Department of Electrical Engineering and Computer Science
- Advisor: Ian W. Hunter
- Department of Mechanical Engineering
A nanofabricated amplitude-division electron interferometer in a transmission electron microscope
Agarwal, Akshay (2016)
- Advisor: Karl K. Berggren
- Department of Electrical Engineering and Computer Science