Theses most similar to Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning (Moon, Euclid E. (Euclid Eberle), 1965-; 2004) read it
Beam alignment and image metrology for scanning beam interference lithography : fabricating gratings with nanometer phase accuracy
Chen, Carl Gang, 1972- (2003)
- Advisor: Mark L. Schattenburg
- Department of Electrical Engineering and Computer Science
Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortions
Konkola, Paul Thomas, 1973- (2003)
- Advisor: Mark L. Schattenburg
- Department of Mechanical Engineering
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisor:
- Department of Electrical Engineering and Computer Science
- Advisor: Mark Schattenburg
- Department of Electrical Engineering and Computer Science
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Three-dimensional nanofabrication of photonic crystals and polarization splitters and rotators
Qi, Minghao, 1973- (2005)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
Multilevel interference lithography--fabricating sub-wavelength periodic nanostructures
Chang, Chih-Hao, 1980- (2008)
- Advisor: Mark L. Schattenburg
- Department of Mechanical Engineering
Three-dimensional nanostructures fabricated by stacking pre-patterned monocrystalline silicon nanomembranes
Fucetola, Corey Patrick (2013)
- Advisor: Henry I. Smith
- Department of Electrical Engineering and Computer Science
- Advisors: George Barbastathis; Mark L. Schattenburg
- Department of Mechanical Engineering